Bruker
Dektak 150
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Bruker Dektak 150 is a surface texture measuring system that uses a diamond-tipped stylus for electromechanical measurements. The Dektak 150 can measure film thickness up to 1000 μm and has a vertical resolution of 1 Å.[1]
How it works
Measurements are made electromechanically by moving the sample beneath a diamond-tipped stylus according to a user-programmed scan length, speed and stylus force. As the stylus moves across the sample, surface variations cause it to be translated vertically, generating an electrical signal that corresponds to step height. The system features a computer interface (Windows XP environment) and a Y automatic stage with 100mm travel, 1μm repeatability, and 0.5μm resolution. Stylus radius options range from 50nm to 25μm. A 640 x 480-pixel camera with manual zoom (variable 0.67 to 4.29mm) aids in positioning. The system can perform small-scale 3-D sample mapping using the Y-axis stage motor control.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- for parts
What do the numbers mean?
Where are the manuals?
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Not publicly documented
Field notes
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Frequently asked questions
What is the scan length of the Dektak 150?
The scan length is 55 mm (2.16 in).[1]
What is the maximum sample size the Dektak 150 can accommodate?
The maximum sample size is 150 mm (6 in).[1]
What is the step height repeatability of the Dektak 150?
Step height repeatability is 6 Å, 1 sigma on a 1 μm step.[1]
What is the vertical resolution of the Dektak 150?
Vertical resolution is 1 Å maximum (at 6.55 μm range).[1]
What is the maximum film thickness the Dektak 150 can measure?
Film thickness measurements up to 1000 μm are supported.[1]
What is the measurement principle of the Dektak 150?
Measurements are made electromechanically by moving the sample beneath a diamond-tipped stylus; vertical stylus displacement produces an electrical signal representing step height.[1]
Not publicly documented
The following facts about the Dektak 150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak 150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak 150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Dektak 150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Dektak 150 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Equipment inventory listing
Last updated Sep 29, 2026.
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