Bruker
DAFP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
Bruker DAFP is also used as a designation for an AFM probe line within Bruker AFM probes.[3]
How it works
The DAFP probe line includes rectangular cantilever probes with antimony doped silicon bodies, reflective aluminum coating, and tip geometries intended for critical dimension and deep trench work.[3]
Where it fits in the process flow
General reference — not yet source-verifiedAFM based metrology sits in the inspection flow after pattern formation when surface topography, sidewall shape, or trench geometry must be checked.
What do the numbers mean?
Power & electrical1
Dimensions & facilities1
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Resonant frequency201-400 kHz[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the DAFP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DAFP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DAFP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DAFP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DAFP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DAFP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.comwaferpedia.com
- [2]Equipment inventory listing
- [3]brukerafmprobes.com — brukerafmprobes.combrukerafmprobes.com
Last updated Oct 7, 2026.
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