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Bruker

Contour GT Optical

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BrukerContour GT Optical
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How it works

The Contour GT system uses an optical metrology module (OMM) that splits light into reference and measurement beams to achieve interference. In VSI mode, a broadband white light source is used; the objective is translated vertically by an internal scanner while the camera captures frames. The height of each pixel is determined by the scanner position at which the modulation of the interference signal reaches a maximum.[2]

In PSI mode, a narrowband light source is employed. The system measures phase shifts in the interference pattern to determine surface height. PSI is typically used for smooth surfaces with roughness below 30 nm and provides sub-nanometer vertical resolution.[2]

The system includes a manual focus knob, a motorized Z-axis wheel, and a tip/tilt stage for sample alignment. Staging allows 150 mm of X and Y travel. The Vision64 software handles instrument control, data analysis, graphical output, and storage of results.[2]

Applications

VSI mode is effective for rough surfaces with adjacent pixel-height differences greater than 135 nm, yielding nanometer-range precision. PSI mode is used for smooth surfaces such as mirrors and polished optics, providing sub-nanometer vertical resolution.[2]

What do the numbers mean?

Vacuum & pumping1

Measurement modes
Vertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI)[2]
Accurate?

Optics & imaging2

Tool type
Optical microscope[1]
Accurate?
Tool type
Optical profiler[2]
Accurate?

Control & software1

Software
Vision64[2]
Accurate?

Configuration & options1

Stage travel
150 mm (6 inches) of x and y travel[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Measurement modesVertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI)[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the maximum sample dimension that fits on the stage?

The Contour GT-K systems come with staging that allows 150 mm (6 inches) of X and Y travel.[2]

What environmental factors should be controlled for optimal performance?

The Bruker Contour GT-K optical profiler systems use compressed clean dry air (CDA) for the vibration isolation system.[2]

What are the essential steps for a beginner to operate the Contour GT-K?

A beginner must become familiar with turning on and off the system, starting/stopping the Vision64 software, positioning a sample (placing the region of interest within the field of view, adjusting focus so fringes are visible, adjusting tip/tilt), selecting measurement parameters, and making a measurement.[2]

Not publicly documented

The following facts about the Contour GT Optical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Contour GT Optical are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Contour GT Optical are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Contour GT Optical are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Contour GT Optical are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Contour GT Optical is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]manualslib.com — manualslib.commanualslib.com
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Last updated Oct 4, 2026.

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