Waferpedia

Applied Materials

Centura MXP

EtchApplied Materials Centura MXP family
Research Quality: 40% complete

The Applied Materials Centura MXP is an etcher used in semiconductor manufacturing. The Centura MXP Etcher is a multi-chamber system with 3 chambers and an HP robot.[1][2][3][4]

Centura MXP — Inventory photo
Fig. 01Centura MXPInventory photo[1]

What it is

The Applied Materials Centura MXP is an etcher.[1][2][3][4]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing chiller

What do the numbers mean?

Power & electrical5

Phase
3 Phase[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
Voltage
208 VAC[1]
Accurate?
Power Supply Voltage
208 VAC[1]
Accurate?
Power Supply Frequency
50 Hz[1]
Accurate?

Wafer handling2

HP Robot[1]
Accurate?
Robot
HP Robot[1]
Accurate?

Configuration & options12

3 CH[1]
Accurate?
4 Wires[1]
Accurate?
Wires
Four[2]
Accurate?
Full Load Current
240 A[2]
Accurate?
Missing Chiller[2]
Accurate?
Missing:[3]
Accurate?
EDP Unit[3]
Accurate?
H/E 1
0242-02163 REV D[3]
Accurate?
UPS
DPWR 35611[3]
Accurate?
H/E (CH-B_C_D_Wall)
0242-02163 REV D[3]
Accurate?
Chambers
3 CH[1]
Accurate?
Number of Wires
Four / 4 Wires[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Frequency50 Hz[1]
  • Voltage208 VAC[1]
  • Power Supply Voltage208 VAC[1]
  • Power Supply Frequency50 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the full load current rating of the Centura MXP?

The full load current rating is 240 A.[2]

What robot type is used for wafer handling in the Centura MXP?

The Centura MXP uses an HP robot.[1][2][3][4]

Not publicly documented

The following facts about the Centura MXP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura MXP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura MXP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura MXP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Centura MXP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Centura MXP are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
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Last updated Sep 25, 2026.

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