Waferpedia

Accretech

UF 200 S

Test & Probe200mmAccretech UF 200 family
Research Quality: 30% complete
UF 200 S — Inventory photo
Fig. 01UF 200 SInventory photo[1]

Wafer size

200mm

Power

208 VAC, Single Phase[1]

Vacuum

Over -53K MPa[1]

What is it?

The Accretech / TSK UF 200 S is a prober for 8-inch wafers, with sources also stating it was configured for 8-inch (200mm) operation.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Not operational due to control board failure.

What do the numbers mean?

Power & electrical2

Voltage
208 VAC, Single Phase[1]
Accurate?
Full Load AMPS
7.2A[1]
Accurate?

Vacuum & pumping2

Vacuum
Over -53K MPa[1]
Accurate?
Air Supply Source Pressure
0.45Mpa or more[1]
Accurate?

Wafer handling3

Loader, Wafer Handling
Backside Holding[1]
Accurate?
Wafer Size
5",6",8", Currently 8"(200mm) Configured[1]
Accurate?
HOT Chuck[1]
Accurate?

Control & software1

GPIB Interface[1]
Accurate?

Dimensions & facilities1

Weight (Main Body)
900kg (Standard)[1]
Accurate?

Configuration & options11

Air
Over 0.45 MPa[1]
Accurate?
Frequency
50/60Hz[1]
Accurate?
Wiring Configuration
2Wire + Ground[1]
Accurate?
Main Breaker Rating
10A[1]
Accurate?
Interrupt Current
10KA A.I.C[1]
Accurate?
Diagram Number
FE06000[1]
Accurate?
Yield Check Function[1]
Accurate?
FAIL Check Function[1]
Accurate?
X/Y axis
Probing Area(±120mm), Maximum Speed(200m/s)[1]
Accurate?
Power Consumption
Approximately 1.5kVA[1]
Accurate?
Manipulator
MHF300L[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • VacuumOver -53K MPa[1]
  • Voltage208 VAC, Single Phase[1]
  • Full Load AMPS7.2A[1]
  • Air Supply Source Pressure0.45Mpa or more[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the UF 200 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UF 200 S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UF 200 S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UF 200 S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the UF 200 S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the UF 200 S are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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