Waferpedia

Comparison ledger

160 XPversusE 1000

Varian 160 XP, Varian E 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
E 1000Varian
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
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FamilyVarian 160 XPVarian E 1000
Cited variants—
Specifications
Configuration (160 XP Ion variant)150mm High Current IMP[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com