Comparison ledger
SUSS MicroTec MA/BA6, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA/BA6SUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA/BA6 | Ultratech 1000 Family |
| Cited variants | — | |
| Specifications | ||
| Type | Contact aligner[3] | — |
| Application | Broadband lithography[3] | — |
| Alignment capability | Backside alignment capability[3] | — |
| Exposure wavelengths | g-line (436 nm), h-line (405 nm), i-line (365 nm), UV broadband (350-450 nm)[1] | — |
| Illumination area | 150 mm diameter[1] | — |
| Resolution (standard) | 1 µm[1] | — |
| Resolution (best) | 0.6 µm in vacuum contact mode[2] | — |
| Topside overlay accuracy | 500 nm[1] | — |
| Backside overlay accuracy | 1000 nm[1] | — |
| Maximum wafer diameter | 150 mm (6 in)[1] | — |
| Substrate sizes | 1" to 150 mm diameter[4] | — |
| Mask sizes | 2.5" x 2.5" to 7" x 7"[4] | — |
| Maximum substrate thickness | 10 mm[4] | — |
| Lamp | 350 W mercury lamp[2] | — |
| Exposure modes | vacuum contact, hard contact, soft contact[2] | — |
| i-line band pass filter | removable[2] | — |
| Alignment accuracy | 0.25 - 0.5 µm[2] | — |
| Backside alignment | Yes[3] | — |
| Tool type | Contact aligner[3] | Photolithography step-and-repeat 1X stepper[5] |
| Alignment modes | Frontside and backside alignment[1] | — |
| Resolution | 1 µm[1] | — |
| Top side overlay accuracy | 500 nm[1] | — |
| Mask sizes supported | 127 mm x 127 mm (5 in.) and 178 mm x 178 mm (7 in.)[1] | — |
| Substrate thickness | 10 mm maximum substrate thickness[4] | — |
| Feature size | Down to 0.6 µm[2] | — |
| Exposure area | 6 in. diameter exposure area[2] | — |
| Light source | 350 W mercury lamp[2] | — |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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