Comparison ledger
Semitool EQ 222 SR Spray Solvent, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EQ 222 SR Spray SolventSemitool | 1000FPYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool EQ 222 SR Spray Solvent | YES 1000FP |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 5 Wire[1] | — |
| Voltage | 208 V[1] | — |
| Make | Semitool[1] | — |
| Model | EQ 222 SR[1] | Glen/YES 1000FP[3] |
| Product type | Spray Solvent Tool (SST)[1] | — |
| Electrical configuration | 3 Phase, 5 Wire, 208 V[1] | — |
| Frequency (one unit) | 50/60 Hz[2] | — |
| Vintage (some units) | 1998[1] | — |
| Vintage (one unit) | 1997[2] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
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