Comparison ledger
RECIF SPP 300 Wafer, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SPP 300 WaferRECIF | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | RECIF | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | Front & Backside Wafer ID Reader (RFID) | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | RECIF SPP 300 Wafer | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | 300 mm (12") FOUP Load Port[1] | — |
| Servicing Port | M / F Rear (Can Add 3rd LP Here)[1] | — |
| Wafer size | Front & Backside Wafer ID Reader (RFID)[1] | — |
| Status Lamp (Front & Rear) | Programmable[1] | — |
| Turn to Release EMO | Load Ports, M / F Rear[1] | — |
| Vacuum (House) | Optional Depending on LPS Used[1] | — |
| Power | 110 VAC, 15 A, 3 Wire, 1 Phase, Freq 60 Hz[1] | — |
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