Waferpedia

Comparison ledger

321versusCS30

Disco 321, Logitech CS30, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
CS30Logitech
OEMDiscoLogitech
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Logitech CS30
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]Ceramic vacuum chuck[4]
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Motor—240/110V, 50/60Hz; 0.25kw belt drive[4]
Blade—200mm diameter; 1.5mm thick; 22mm arbor; 1800 r.p.m[4]
Slide Size—2 of 28 x 48mm/26 x 46mm or 1 of 26 x 76mm[4]
Dimensions—530 x 240 x 300mm[4]
Net Weight—30kg[4]
Blade diameter—200mm[4]
Blade thickness—1.5mm[4]
Blade arbor—22mm[4]
Blade speed—1800 r.p.m[4]
Slide size capacity—2 of 28 x 48mm/26 x 46mm or 1 of 26 x 76mm[4]
Dimensions (W x D x H)—530 x 240 x 300mm[4]
Minimum specimen thickness (trimming)—500 µm[4]
Machine type—Compact trim saw[4]
Application—Thin section preparation[4]
Minimum trimming thickness—500 µm[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]web.archive.orgweb.archive.org