Comparison ledger
Axcelis GSD 200 E 2 Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 IonAxcelis | 160 XPVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| High Current | GSD-200EE[2] | — |
| Configuration | Software Version 6.12.3[2] | — |
| Ion Source Type | ELS[2] | — |
| Source Material Type | Moly[2] | — |
| Single Stage Extraction | 90keV[2] | — |
| Beamline Version | Standard[2] | — |
| Source Turbo Pump (P1) | STP H2000C[2] | — |
| Beam Line Cryo Pump (P3) | CTI Onboard 10[2] | — |
| End Station Cryo Pump (P2) | CTI Onboard 8[2] | — |
| Manufacturer | Axcelis[2] | — |
| Model | GSD 200 E 2[2] | — |
| Category | Ion Implantation[3] | — |
| Wafer size | 6 inch[2] | — |
| Software version | 6.12.3[2] | — |
| GEM/SECS interface | Present[2] | — |
| Cassette capability | 4-cassette capability[2] | — |
| Automated beam tuning and set-up | w/Eaton Autotune[2] | — |
| Energy range | 90KeV[2] | — |
| Beamline and source pumps | Beamline and Source Pumps[3] | — |
| Gas Type | MFC Type and Model[2] | — |
| Ar | UNIT 1662 10SCCM - SDS[2] | — |
| BF3 | UNIT 1662 10SCCM - SDS[2] | — |
| AsH3 | UNIT 1662 10SCCM - SDS[2] | — |
| PH3 | UNIT 1660 10SCCM - SDS[2] | — |
| External Facilities Connections | Ar N2[2] | — |
| Cryo Compressors | CTI 9600 (1)[2] | — |
| Remote Disk Chiller | SMC-HRS050[2] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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