Waferpedia

Comparison ledger

0010-13622 RF Match forversusVector

Applied Materials 0010-13622 RF Match for, Lam Research Vector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
VectorLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forLam Research Vector
Cited variants—
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[2]—
Model0010-13622[2]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[2]—
FeatureHigh Efficiency HE RF Match-Bias[2]—
Process—Plasma-Enhanced Chemical Vapor Deposition (PECVD)[1]
Product family—VECTOR Product Family[1]
Wafer size—12 inch[3]
Architecture—Quad station module (QSM)[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]lamresearch.comlamresearch.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing