Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Asyst Versaport 2200 Indexer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Asyst |
| Category | — | — |
| Wafer size | — | 2nd EPROM has the firmware for wafer cassettes (in spare) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Asyst Versaport 2200 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | Versaport 2200[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| P.N | — | 9700-5384-01 REV.4- used for both mask cassettes and wafer cassettes[2] |
| Configuration | — | 2 EPROM chips:[2] |
| Wafer size | — | 2nd EPROM has the firmware for wafer cassettes (in spare)[2] |
| Manufacturer | — | Asyst[2] |
| Part number | — | 9700-5384-01 REV.4[2] |
| Cassette type | — | 8” Cassette[2] |
| Mounting configuration | — | Bolt Back Plate[2] |
| RFID support | — | RFID Smart Tag support[2] |
| Firmware | — | 2 EPROM chips; 1st EPROM has firmware for mask cassettes (installed currently), 2nd EPROM has firmware for wafer cassettes (in spare)[2] |
| Cassette compatibility | — | Used for both mask cassettes and wafer cassettes[2] |
| Condition | — | Refurbished[2] |
| Sensor adjustment | — | The user just needs to adjust the sensor parameters via ISIM to work with your cassettes[3] |
| Technical manual | — | VersaPort 2200 Technical Manual, P/N 2000-1252-01, Rev. C, dated 6/12/2007[4] |