Asyst

Versaport 2200 Indexer

2nd EPROM has the firmware for wafer cassettes (in spare)Asyst Versaport 2200 family

Research Quality: 30% complete

The Asyst Versaport 2200 Indexer is an indexer used for both mask cassettes and wafer cassettes. The Versaport 2200 accepts an 8-inch (200mm) cassette. The Versaport 2200 includes a bolt back plate and RFID Smart Tag support.^[1]^[2]^[3]

AsystVersaport 2200 Indexer

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Where it fits in the process flow

The Versaport 2200 sits at a cassette transfer point in the manufacturing flow. The tool handles mask cassettes and wafer cassettes, so it belongs near the interface between storage, transport, and process equipment.^[1]^[4]^[2]

What do the numbers mean?

Wafer handling9

P.N: 9700-5384-01 REV.4- used for both mask cassettes and wafer cassettes^[1]; 1st EPROM has the firmware for mask cassettes (Installed currently)^[1]
Wafer size: 2nd EPROM has the firmware for wafer cassettes (in spare)^[1]; 8” Cassette^[1]
Wafer size: 8 inch (200mm)^[1]
Cassette type: 8” Cassette^[1]
Firmware: 2 EPROM chips; 1st EPROM has firmware for mask cassettes (installed currently), 2nd EPROM has firmware for wafer cassettes (in spare)^[1]
Cassette compatibility: Used for both mask cassettes and wafer cassettes^[1]
Sensor adjustment: The user just needs to adjust the sensor parameters via ISIM to work with your cassettes^[2]

Configuration & options11

2 EPROM chips:^[1]; Bolt Back Plate^[1]; RFID Smart Tag support^[1]; Refurbished^[1]
Manufacturer: Asyst^[1]
Model: Versaport 2200^[1]
Part number: 9700-5384-01 REV.4^[1]
Mounting configuration: Bolt Back Plate^[1]
RFID support: RFID Smart Tag support^[1]
Condition: Refurbished^[1]
Technical manual: VersaPort 2200 Technical Manual, P/N 2000-1252-01, Rev. C, dated 6/12/2007^[4]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What cassette types does the Versaport 2200 handle?

The Versaport 2200 is used for both mask cassettes and wafer cassettes.^[1]^[4]^[2]^[5]^[3]

Not publicly documented

The following facts about the Versaport 2200 Indexer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versaport 2200 Indexer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Versaport 2200 Indexer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Versaport 2200 Indexer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Versaport 2200 Indexer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Versaport 2200 Indexer is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]inventory listing
[2]tarasemi.com — tarasemi.comtarasemi.com
[3]Asyst Technologies Versaport 2200 Indexer — wotol.comwotol.com
[4]data2.manualslib.com — data2.manualslib.comdata2.manualslib.com
[5]Versaport 2200 Indexer — Asyst | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com