Comparison ledger
Varian 160 XP, Varian E 500 EHP Medium Current, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XPVarian | E 500 EHP Medium CurrentVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Includes thin wafer handling kit |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP | Varian E 500 EHP Medium Current |
| Cited variants |
| — |
| Specifications | ||
| Configuration (160 XP Ion variant) | 150mm High Current IMP[1] | — |
| Wafer size | — | Includes thin wafer handling kit[2] |
| Configuration | — | Can be converted to 8"[2] |
| Phase | — | 3 Phase[2] |
| Voltage | — | 208V[2] |
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