Comparison ledger
SUSS MicroTec AS 8 Spray, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AS 8 SpraySUSS MicroTec | 1000FPYES |
|---|---|---|
| OEM | SUSS MicroTec | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec AS 8 | YES 1000FP |
| Specifications | ||
| Configuration | Semi Automatic[1] | — |
| Conformal Coating | ensures top edge coverage while avoiding resist accumulation in trenches[1] | — |
| Dual Dispense System | up to two separate spray dispense system to prevent cross-contamination[1] | — |
| Touchscreen Interface | equipped with MMC controller software[1] | — |
| Programmable Recipes | all spray and cleaning parameters can be customized and saved[1] | — |
| System type | — | Plasma cleaning system[2] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[2] |
| Model | — | Glen/YES 1000FP[2] |
| Designed use | — | Designed to accept a range of shelf sizes[2] |
| Application focus | — | Changing needs of the flat panel industry[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →