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AS 2000 alternatives
Comparable CMP equipment documented in the Waferpedia catalog.
6 comparable tools
Lapmaster
72
CMP
The Lapmaster 72 is a polisher with 27" ID rings, a 5–32 RPM range, 25 HP, and 480 V input.
Lam Research
IPEC 472
CMP
The Lam / IPEC 472 is a chemical mechanical planarization (CMP) tool.
Lam Research
IPEC AvantGaard 776
CMP
The Lam / IPEC AvantGaard 776 is an 8-inch chemical mechanical polisher (CMP) available in dielectric and tungsten configurations.
SUSS MicroTec
PA 300 Control
CMP
The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.
Applied Materials
Reflexion
CMP
The Applied Materials Reflexion is a chemical mechanical polishing (CMP) system for 12-inch wafers.
Nova
V 2600
CMP
The Nova V 2600 is a CMP (Chemical Mechanical Polisher) for 12-inch wafers.
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