Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron Alpha 303 i K, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 303 i KTokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron Alpha 303 |
| Cited variants | — | |
| Specifications | ||
| Configuration | 4"[3] | MTO[1] |
| Type | Hot Plate[3] | — |
| Wafer Size | 4 inch[3] | — |
| Software Version | — | V 2.13 Rev.004[4] |
| CIM | — | SECS[5] |
| Process | — | MOL[5] |
| Factory Interface | — | FOUP[4] |
| Handler System | — | Loadport (2)[4] |
| Category | — | Thermal / Diffusion[4] |
| Wafer size | — | 12 inch[1] |
| Tool type | — | Furnace[4] |
| CIM SECS | — | Supported[4] |
| Configuration options | — | MTO, DCS-MTO[4] |
| Vintage (MTO) | — | 2002[1] |
| Vintage (DCS-MTO) | — | 2009[2] |
| Handler system | — | 2 Handler System Loadport (2)[4] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →