Comparison ledger
Cascade Microtech 103-754, Electroglas EG4, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 103-754Cascade Microtech | EG4Electroglas |
|---|---|---|
| OEM | Cascade Microtech | Electroglas |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6-inch diameter microchamber and thermal chuck | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 103-754 | Electroglas EG4 |
| Cited variants | — |
|
| Specifications | ||
| type | x-y-z-θ probe positioner[2] | — |
| installed on | HFTL 50-GHz Small-Signal Probe Station[2] | — |
| quantity in station | two[2] | — |
| station chuck size | 6-inch-diameter microchamber and thermal chuck[2] | — |
| Quantity per station | Two positioners[2] | — |
| Chuck size | 6-inch-diameter microchamber and thermal chuck[2] | — |
| Temperature range | -50 to 200 °C[2] | — |
| Type | — | wafer prober[3] |
| Wafer size | — | 200mm[3] |
| Z-force | — | up to 150 kilograms[3] |
| Z-drive | — | probe-centered Z-drive[3] |
| Z-drive type | — | Probe centered Z-drive[3] |
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