Waferpedia

Comparison ledger

Tespversus1007

Bruker Tesp, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
TespBruker
1007KLA
OEMBrukerKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker TespKLA 1007
Cited variants—
Specifications
Equipment typeTest & Probe[2]Prober[5]
ModelTesp[3]1007[4]
Asset descriptionProber[3]—
Variant designationTESP-V2[1]—
GeometryRectangular[1]—
FrequencyNominal 320 kHz[1]—
Spring constantNominal 37 N/m[1]—
Tip radiusNominal 7 nm[1]—
LengthNominal 123 µm[1]—
WidthNominal 40 µm[1]—
Manufacturer—KLA[4]
Description—Wafer Prober[4]
Wafer size—150 mm[4]
Convertible to 8 inch wafer size—Yes[4]
Vintage—01.06.1995[4]
Make—KLA[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]brukerafmprobes.combrukerafmprobes.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]Equipment inventory listing