Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR S 203 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR S 203 BNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR S 203 |
| Specifications | ||
| Software Version | — | MCSV[1] |
| CIM | — | SECS[1] |
| Handler System | — | WL Type 3[1] |
| Factory Interface | — | Open Cassette[1] |
| Excluded | — | Hard Drives (2)[1] |
| Process | — | Scanner[2] |
| Configuration | — | 248 nm[2] |
| Handler | — | WL Type 3[4] |
| IU Flare | — | 0.84%[4] |
| Lens Flare | — | 8.50%[4] |
| Uniformity | — | 6.00%[4] |
| Power | — | 541 mW/cm2[4] |
| Total Focus Deviation | — | 0.202 µm[4] |
| Astigmatism | — | 0.119 µm[4] |
| Coma | — | 0.040 µm[4] |
| ISO DOF | — | 0.275 µm[4] |
| Wafer size | — | 200 mm (8 inch)[1] |
| Wavelength | — | 248 nm[2] |
| Process type | — | Scanner[2] |
| CIM interface | — | SECS[1] |
| Iso DOF | — | 0.241 µm[5] |
| Light source | — | Cymer ELS 5410[3] |
| Manufacturer | — | Nikon[1] |
| Model | — | NSR S 203 B[1] |
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