Waferpedia

Comparison ledger

101-149-053 Gold Boosterversus850 SOI Wafer

Branson 101-149-053 Gold Booster, EV Group 850 SOI Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBransonEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBranson 101-149-053 Gold BoosterEV Group 850
Specifications
Configuration1:1.5[1]Fully-Automatic[4]
ManufacturerBranson[2]EV Group[5]
Model101-149-053[2]850 SOI Wafer[4]
TypeGold Booster[2]—
Operating frequency20 kHz[3]—
Gain1:1.5[2]—
Mounting thread1/2-20[3]—
Length5.4 in[3]—
Gain ratio1:1.5[2]—
Wafer size—Suitable for wafer sizes up to 6"/150mm wafers[4]
Category—Packaging & Bonding[5]
Operating mode—Fully-Automatic[4]
Maximum wafer size—up to 6"/150mm wafers[4]
Current configuration—configured for 6"/150mm wafers[4]
Robot—One Genmark Robot with pre-aligner[4]
Cleaning modules—Two Cleaning Modules[4]
Bonding station—One bonding station with high vacuum[4]
Pre-aligner—Mechanical pre-aligner on bond station (pneumatically actuated)[4]
Control interface—PC controlled with Windows-based graphical user interface[4]
Access control—Password protected access levels[4]
Cleaning control—Programmable rotational speed for substrate cleaning[4]
Cleaning option—Megasonic cleaning option[4]
Vintage—2000[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]nextdayautomation.comnextdayautomation.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]lithosupport.comlithosupport.com