Comparison ledger
Axcelis NV GSD HE Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV GSD HE IonAxcelis | 160 XPVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | 6" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD HE Ion | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Refurbished in 2023[2] | — |
| Wafer size | 6" Wafer Handling Station Installed[2] | — |
| Frequency | 60 Hz[3] | — |
| Phase | 3 phase[3] | — |
| Full Load Current | 99 A[2] | — |
| Power | 82 kVA[2] | — |
| Input Breaker | 150 A[2] | — |
| Amp Rating Largest Load | 99 A[3] | — |
| Max Interrupt Capacity | 14 kA[2] | — |
| Beam Exhaust | 1 MeV[3] | — |
| Beam Current | 1 mA[2] | — |
| Main Computer | Solaris, SW 5.3[2] | — |
| Main Monitor | LCD[2] | — |
| Second Computer | Solaris[2] | — |
| Second Monitor | LCD[2] | — |
| OEM | Axcelis[2] | — |
| Model | NV GSD HE[2] | — |
| Category | Ion Implantation[3] | — |
| Wafer Sizes | 6, 8 inch[2] | — |
| Refurbished | 2023[2] | — |
| Beam Handling | Notch[2] | — |
| Dummy Cassette | 25[2] | — |
| Load Buffer | 17[2] | — |
| Vacuum Cassette | 17[2] | — |
| Beam Profile Oscilloscope | Included[2] | — |
| Wafer Handling Station Installed | 6 inch[2] | — |
| Disk Type | ACLS 11003980[2] | — |
| Gyro & Angle - Type & Degree | Alpha & Beta, +/-11 degrees[2] | — |
| Rotary Driver | 1200 rpm[2] | — |
| HV Power Supply | Hunting Hivolt[2] | — |
| HV Stack | Hunting Hivolt[2] | — |
| AMU | Buckley[2] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →