Waferpedia

Comparison ledger

0041-26723 Bonded Assemblyversus501 Wafer

Applied Materials 0041-26723 Bonded Assembly, EV Group 501 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
501 WaferEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—Manual wafer load substrate bonder
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 501 Wafer
Specifications
Wafer size—Manual wafer load substrate bonder[1]
Configuration—Capable of fusion compression bonding[1]
Max Bond Force—7 kN[1]
Top side heater—550°C max. in 1°C steps[1]
Bottom side heater—550°C max. in 1°C steps[1]
Temperature uniformity—± 1,5 %[1]
Wafer sizes—2, 3, 4, 5, 6 inch (up to 150 mm)[1]
Substrate size—single chips to 200 mm[2]
Max bond force—7 kN (source 1) or up to 20 kN (source 2)[1]
Top side heater max temperature—550°C in 1°C steps (source 1)[1]
Bottom side heater max temperature—550°C in 1°C steps (source 1)[1]
Maximum temperature (source 2)—up to 450°C[2]
Vacuum (standard)—1x10-1 mbar[2]
Vacuum (optional)—1x10-5 mbar[2]
Power supply for anodic bonding—0-2000 V, 0-50 mA[2]
Footprint—0.8 m2[2]
Conversion time—less than 5 minutes[2]
Control software—Windows-based[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]aggiefab.tamu.eduaggiefab.tamu.edu