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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus850 SOI Wafer

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 850 SOI Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedEV Group 850
Specifications
ConfigurationRefurbished[1]Fully-Automatic[2]
Wafer size—Suitable for wafer sizes up to 6"/150mm wafers[2]
Manufacturer—EV Group[3]
Model—850 SOI Wafer[2]
Category—Packaging & Bonding[3]
Operating mode—Fully-Automatic[2]
Maximum wafer size—up to 6"/150mm wafers[2]
Current configuration—configured for 6"/150mm wafers[2]
Robot—One Genmark Robot with pre-aligner[2]
Cleaning modules—Two Cleaning Modules[2]
Bonding station—One bonding station with high vacuum[2]
Pre-aligner—Mechanical pre-aligner on bond station (pneumatically actuated)[2]
Control interface—PC controlled with Windows-based graphical user interface[2]
Access control—Password protected access levels[2]
Cleaning control—Programmable rotational speed for substrate cleaning[2]
Cleaning option—Megasonic cleaning option[2]
Vintage—2000[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]lithosupport.comlithosupport.com