Comparison ledger
Applied Materials 0010-03254 E Chuck, Lam Research TCP 9400, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | TCP 9400Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1996– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research TCP 9400 |
| Cited variants | — |
|
| Specifications | ||
| Etch Technology | — | Transformer Coupled Plasma (TCP)[2] |
| RF Frequency | — | 13.56 MHz[2] |
| Number of RF Power Supplies | — | 2[2] |
| Maximum Etch Depth | — | 3 µm[2] |
| Primary Materials Etched | — | Silicon[2] |
| Other Materials Etched | — | Silicon Germanium, Germanium[2] |
| Gases | — | Chlorine, He/O2, Helium, Hydrogen Bromide, Nitrogen, Oxygen, Perfluoroethane, Tetrafluoromethane[2] |
| Substrate Sizes (SNF configuration) | — | 4 inch[2] |
| Substrate Sizes (standard configuration) | — | 8 inch[3] |
| Maximum Wafer Load | — | 25 wafers[2] |
| Transport System | — | Cassette to cassette[1] |
| Software | — | Envision version 1.4[1] |
| Vintage Year | — | 1996[1] |
| Platform | — | Rainbow[1] |
| Vacuum Pump | — | Leybold TURBOVAC 1000C[1] |
| Chamber Type | — | Ceramic free with waferless auto clean (WAC)[1] |
| Configuration | — | Single chamber stand-alone[1] |
| Inductively Coupled Source | — | TCP 9400 ESC[1] |
| CE Certified | — | Yes[1] |