Waferpedia

Vitronics

Soltec XPM 2 1030

Thermal / Diffusion
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

VitronicsSoltec XPM 2 1030
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What it is

The Vitronics Soltec XPM 2 1030 is a thermal processing tool in the diffusion category.[2]

The Vitronics Soltec XPM 2 1030 is an oven. The model name is XPM 2 1030.[1][2]

How it works

General reference — not yet source-verified

A thermal processing oven applies controlled heat to process materials in a chamber.

A diffusion-class thermal tool is used to heat wafers or other substrates so thermal steps can occur in a controlled environment.

Where it fits in the process flow

The Vitronics Soltec XPM 2 1030 belongs in the thermal and diffusion segment of semiconductor processing.[2]

Applications

The Vitronics Soltec XPM 2 1030 is used for thermal processing work in a diffusion context.[2]

What do the numbers mean?

Configuration & options6

Equipment type
Oven[1]
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Make
Vitronics Soltec[1]
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Model
XPM 2 1030[1]
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Category
Thermal / Diffusion[2]
Accurate?
Asset #
69385[1]
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Vintage
2005[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Soltec XPM 2 1030 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Soltec XPM 2 1030 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Soltec XPM 2 1030 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Soltec XPM 2 1030 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Soltec XPM 2 1030 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Soltec XPM 2 1030 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 3, 2026.

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