VAT

PM 5 Adaptive Pressure Controller

VAT PM 5 Adaptive Pressure Controller family

Research Quality: 50% complete

The VAT PM 5 Adaptive Pressure Controller is a VAT PM-5 Series 64.1 adaptive pressure vacuum throttle gate valve controller. VAT PM-5 valve controllers are used to control individual valves to adjust pumping speed throughput. The PM-5 is designed for the VAT series 64 servo-stepper.^[1]

PM 5 Adaptive Pressure Controller — Inventory photo — Fig. 01PM 5 Adaptive Pressure ControllerInventory photo^[2]

Power

50/60 Hz^[3]

Vacuum

0.1% of the sensor full scale range^[1]

What it is

The VAT PM 5 is a controller in the vacuum valves and chambers family. The model name and the descriptive phrase adaptive pressure controller indicate a device used to regulate chamber pressure by controlling a valve in a vacuum line.^[1]

How it works

The VAT PM 5 controls an individual valve to adjust pumping speed and throughput. The controller can accept data from measuring devices and use that input to regulate process chamber pressure automatically.^[1]

The VAT PM 5 is designed for the VAT series 64 servo-stepper. The controller interfaces with pressure sensors through selectable sensor input voltages and provides logic and analog inputs and outputs for external control integration.^[1]

Applications

The VAT PM 5 is used for pressure control in vacuum process chambers. The controller is suitable for tool conditions where pumping speed, throughput, and chamber pressure must be adjusted together.^[1]

What do the numbers mean?

Power & electrical10

50/60 Hz^[3]; 100-240V^[3]
Mains frequency: 50/60 Hz^[1]
Mains voltage: 100-240V^[3]
Mains voltage: 100 - 240 V (± 10%)^[1]
Pressure sensor input voltage: 0 - 1 V, 2 V, 5 V, 10 V (selectable)^[1]
Supply voltage: ± 15 V (± 5%), max. 1,400 mA^[1]
Inputs (interface option) analog: 0 - 10 V, R i > 100 kOhm^[1]
Outputs (interface option) logic: Potential-free relay contacts max. 70 V, 500 mA^[1]
Outputs (interface option) analog: 0 - 10 V, max. 1 mA^[1]

Vacuum & pumping1

Pressure control accuracy: 0.1% of the sensor full scale range^[1]

Control & software3

Software: 64PM.3I.00^[3]
Position control: 1,000 positions^[1]
Inputs (interface option) logic: Relay contacts or optocoupler^[1]

Dimensions & facilities3

Dimensions (w x h x d): 241 x 88 x 264 mm (9.5" x 3.5" x 10.5")^[1]
Form factor: ½ of 19" rack insert, 2 height units^[1]
Weight (basic unit): 3.4 kg (7.5 lbs)^[1]

Configuration & options12

VAT P/N: 225599^[3]; Max 150W^[3]
OEM: VAT^[2]
Model: PM 5^[2]
VAT part number: 225599^[3]
Max power: 150W^[3]
Power required: Max. 150 W^[1]
Ambient temperature: 0 - 50°C^[1]
Sensor input: Differential, R i > 100 kOhm^[1]
Power Failure Option (PFO) battery type: NiCd^[1]
Minimum charge time: 10 h^[1]
Battery lifetime at 35°C: 20 months^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration50/60 Hz^[3]
Configuration100-240V^[3]
Mains frequency50/60 Hz^[1]
Mains voltage100-240V^[3]
Mains voltage100 - 240 V (± 10%)^[1]
Pressure control accuracy0.1% of the sensor full scale range^[1]
Pressure sensor input voltage0 - 1 V, 2 V, 5 V, 10 V (selectable)^[1]
Supply voltage± 15 V (± 5%), max. 1,400 mA^[1]
Inputs (interface option) analog0 - 10 V, R i > 100 kOhm^[1]
Outputs (interface option) logicPotential-free relay contacts max. 70 V, 500 mA^[1]
Outputs (interface option) analog0 - 10 V, max. 1 mA^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the main function of the VAT PM 5?

The VAT PM 5 controls an individual valve to adjust pumping speed and throughput. The controller can also accept data from measuring devices to automatically control process chamber pressure.^[1]

What valve family is the VAT PM 5 designed for?

The VAT PM 5 is designed for the VAT series 64 servo-stepper.^[1]

Not publicly documented

The following facts about the PM 5 Adaptive Pressure Controller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM 5 Adaptive Pressure Controller are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM 5 Adaptive Pressure Controller are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM 5 Adaptive Pressure Controller are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM 5 Adaptive Pressure Controller are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM 5 Adaptive Pressure Controller is not on record.
Answerable by: an OEM datasheet or a fab qualification report