Varian
20L 100V 200W Ion Pump Set
The Varian 20L 100V 200W Ion Pump Set is a sold-as-set pair of 20 litre ion pumps with magnet. The Varian 20L 100V 200W Ion Pump Set includes a 304 LN ESR fitting. The Varian 20L 100V 200W Ion Pump Set is compatible with Hitachi SEM models S-4200 and S-4500.[1][2][3]
What it is
What do the numbers mean?
Power & electrical1
Vacuum & pumping4
- 911-5036 20 Litre Ion Pumps with Magnet[1]
Configuration & options10
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the operating voltage of the Varian 20L 100V 200W Ion Pump Set?
What is the part number for this ion pump set?
The part number is 911-5036.[1]
Not publicly documented
The following facts about the 20L 100V 200W Ion Pump Set are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 20L 100V 200W Ion Pump Set are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 20L 100V 200W Ion Pump Set are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 20L 100V 200W Ion Pump Set are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 20L 100V 200W Ion Pump Set are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 20L 100V 200W Ion Pump Set is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]20L 100V 200W Ion Pump Set — Varian | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Varian 20L 100V 200W Ion Pump Set family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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