Ultratech
LSA100
What it is
The Ultratech product family includes laser processing systems and other tools used in semiconductor fabrication, and the company also supplied lithography and nanotechnology-related equipment.[1]
How it works
Ultratech entered the rapid thermal processing market when it shipped its Laser Processing system.[1]
Where it fits in the process flow
Ultratech's technology portfolio included tools for semiconductor fabrication plants, and the company also served nanotechnology applications.[1]
Applications
General reference — not yet source-verifiedThermal processing equipment is used for wafer heating steps in integrated-circuit manufacturing.
- laser spike annealing
What do the numbers mean?
Optics & imaging2
Configuration & options3
Vintage & configurations
- 2004Introduction on Unity Platform[1]
The LSA100 was first introduced on Ultratech's Unity Platform in mid-2004.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of company supplied the LSA100?
Ultratech was a semiconductor equipment company based in Santa Clara, California.[1]
What market did Ultratech enter with its laser processing product?
Ultratech entered the rapid thermal processing market when it shipped its Laser Processing system.[1]
What broader equipment segments did Ultratech serve?
Ultratech supplied equipment to global semiconductor fabrication plants and also made tools for nanotechnology applications by optical networking, data storage, automotive, and display industries.[1]
Not publicly documented
The following facts about the LSA100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the LSA100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the LSA100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the LSA100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the LSA100 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the LSA100 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
Last updated Oct 9, 2026.
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