Waferpedia

Tokyo Electron

WDF 12 DP

Test & ProbeTokyo Electron WDF 12 DP family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

General reference — not yet source-verified

A wafer prober positions a semiconductor wafer beneath a probe assembly so that individual die can be contacted for electrical testing; probers of this class belong to the test and probe segment of semiconductor manufacturing.

How it works

General reference — not yet source-verified

A wafer prober moves the wafer into alignment with a probe card using a precision stage.

Alignment is performed by comparing wafer fiducials with the probe card pattern through an optical system.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probing is performed after wafer fabrication and before dicing or assembly.

The prober is used in the wafer-sort stage, where devices are electrically tested to determine which die are functional; good die proceed to packaging and final test, while failing die are omitted from downstream assembly.

Applications

General reference — not yet source-verified

Wafer probers such as the WDF 12 DP are used for wafer-level testing of integrated circuits and other semiconductor devices.

Probing is used in manufacturing test, yield analysis, and process monitoring on wafers that have completed front-end processing.

What do the numbers mean?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the WDF 12 DP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the WDF 12 DP are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WDF 12 DP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WDF 12 DP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WDF 12 DP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WDF 12 DP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Oct 1, 2026.

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