Tokyo Electron
Unity II E 85 TPATC
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tokyo Electron Unity II E 85 TPATC is a dry etcher. The Tokyo Electron Unity II E 85 TPATC is specified for 8-inch wafers.[1]
What is it?
What do the numbers mean?
Wafer handling1
Configuration & options6
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Unity II E 85 TPATC Dry | — | — | — | waferpedia.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Does the Unity II E 85 TPATC belong to a broader tool family?
Yes, the Unity II E 85 TPATC is part of the Tokyo Electron Unity II E 85 family, which contains several etch configurations for 8-inch wafers.[4][3]
Are there other configurations in the Unity II E 85 family?
The Unity II E 85 family includes the Unity II E 85 DD, which is an 8-inch oxide etch system, and the Unity II E 85 DPA, which is a semiconductor equipment model for 8-inch wafer processing. The Unity II E 85 TPATC is another model in the same family.[4]
Not publicly documented
The following facts about the Unity II E 85 TPATC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unity II E 85 TPATC are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Unity II E 85 TPATC are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unity II E 85 TPATC are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unity II E 85 TPATC is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Unity II E 85 TPATC are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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