Tokyo Electron
MK 7 S
The Tel MK 7 S is a coater/developer manufactured by Tokyo Electron. The Tel MK 7 S processes 8-inch wafers. The Tel MK 7 S includes a command post with system version MK8G2.38 and supports GEM 1.72.[1][2][3][4]
What it is
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing resist pumps (2)
- Missing developer line
What do the numbers mean?
Vacuum & pumping2
Wafer handling2
Gas & chemistry2
Control & software6
Configuration & options27
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MK 7 S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MK 7 S are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MK 7 S are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MK 7 S are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the MK 7 S is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MK 7 S are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
- [4]inventory listing
Last updated Oct 5, 2026.
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