Tokyo Electron
Certas Wing
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe Tokyo Electron Certas Wing is an etch equipment model.
How it works
General reference — not yet source-verifiedAn etch tool removes selected material from a wafer surface by exposing the surface to controlled process gases and process conditions.
Where it fits in the process flow
General reference — not yet source-verifiedEtch equipment sits in the wafer fabrication flow after pattern definition and before subsequent build or completion steps.
Applications
General reference — not yet source-verifiedEtch tools are used to remove targeted films, clear selected layers, and shape patterned features on semiconductor wafers.
What do the numbers mean?
Gas & chemistry2
- 2CH, Wing type, 5 gas lines[1]
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Certas Wing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Certas Wing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Certas Wing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Certas Wing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Certas Wing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Certas Wing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]TEL NS300 | Tokyo Electron — tel.com (Apr 30, 2012)web.archive.org
Last updated Oct 3, 2026.
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