Tegal
903 E Dry
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tegal 903 E Dry is a dry etcher used in semiconductor manufacturing. The Tegal 903 E Dry processes 6-inch wafers.[1]
What it is
How it works
General reference — not yet source-verifiedThe system includes a wafer holder or chuck that may provide temperature control and helium backside cooling. Gas flow and chamber pressure are regulated to maintain a stable plasma, and endpoint detection systems can monitor the etch progress in real time.
Where it fits in the process flow
General reference — not yet source-verifiedAfter etching, the wafer moves to resist stripping and cleaning steps. The equipment is suited for front-end-of-line and back-end-of-line processing where precise material removal is required.
Applications
General reference — not yet source-verifiedIn addition to mainstream CMOS fabrication, such etch tools are used in MEMS, power device, and optoelectronic manufacturing where pattern transfer fidelity is critical.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 903 E Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 903 E Dry are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 903 E Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 903 E Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 903 E Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 903 E Dry are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]903 E Dry — Tegal | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 28, 2026.
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