Sumitomo
SWA 20 GD Laser Anneal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedLaser anneal tools use a directed thermal process to heat selected regions of a wafer and then let the material relax or recrystallize after implantation or other damage.
Anneal equipment in this class supports controlled thermal treatment rather than pattern transfer or deposition.
Where it fits in the process flow
The SWA 20 GD Laser Anneal belongs in the thermal and diffusion segment of semiconductor processing.[1]
Applications
General reference — not yet source-verifiedLaser anneal equipment is used for thermal treatment in semiconductor fabrication.
Thermal and diffusion tools support process steps that modify material properties without defining circuit geometry.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SWA 20 GD Laser Anneal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the SWA 20 GD Laser Anneal are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SWA 20 GD Laser Anneal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SWA 20 GD Laser Anneal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SWA 20 GD Laser Anneal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SWA 20 GD Laser Anneal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]SWA 20 GD Laser Anneal — Sumitomo | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [2]Equipment inventory listing
Last updated Oct 6, 2026.
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