Semitool
SST C 421 280 Batch Wafer Processing
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Semitool SST C 421 280 incorporates a heat exchanger and provides vacuum capability. Utility requirements for the system include compressed dry air (CDA) at 65–70 PSI, deionized water at a minimum of 35 PSI, and process gas supplies for nitrogen and carbon dioxide. The system's electrical power requirement is 208 VAC, three-phase, at 50/60 Hz, with a full load current of 30 A, a largest motor load of 10 A (15 HTR), and a short-circuit interrupting rating of 10,000 A.[1][2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- One source states visible corrosion on modules.
- One source notes all cables present but not included / not equipped for several listed items.
What do the numbers mean?
Power & electrical6
- Missing Components
- Wafer Handler, Power Supply, AC Distribution Box, External Transformer, UPS, Backing Pump(s), Shipping Brackets[2]
Vacuum & pumping6
Wafer handling3
Gas & chemistry1
Configuration & options12
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power50/60 Hz - 208 VAC - 3 Phase[1]
- VacuumPresent[2]
- CDA65–70 PSI[2]
- DI Water35 PSI Minimum[2]
- Process GasN₂ / CO₂[2]
- Missing ComponentsWafer Handler, Power Supply, AC Distribution Box, External Transformer, UPS, Backing Pump(s), Shipping Brackets[2]
- Voltage208 VAC[1]
- Phase3 Phase[1]
- Power208 VAC, 50/60 Hz, 3 Phase[1]
- CDA Pressure65–70 PSI[2]
- DI Water Pressure (Minimum)35 PSI[2]
- Frequency50/60 Hz[1]
- DI water pressure35 PSI minimum[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Semitool SST C 421 280 support?
The Semitool SST C 421 280 is available with 6-inch and 8-inch wafer size configurations.[1][2][3][4]
What are the electrical power requirements for the Semitool SST C 421 280?
The system operates on 208 VAC, three-phase power at 50/60 Hz, with a full load current of 30 A, a largest motor load of 10 A (15 HTR), and a short-circuit interrupting rating of 10,000 A.[1]
Not publicly documented
The following facts about the SST C 421 280 Batch Wafer Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SST C 421 280 Batch Wafer Processing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SST C 421 280 Batch Wafer Processing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SST C 421 280 Batch Wafer Processing are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SST C 421 280 Batch Wafer Processing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SST C 421 280 Batch Wafer Processing are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 5, 2026.
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