Waferpedia

Semitool

270 SRD

Semitool 270 SRD family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Semitool 270 SRD is a spin rinse dryer for wafer processing. The Semitool 270 SRD can be configured with 4 inch or 6 inch rotors, and a special order rotor for 8 inch wafers.[1][2]

Semitool logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The 270 SRD is manufactured by Semitool. The equipment handles 4-inch and 6-inch wafers; an 8-inch rotor is available as a special order.[1][2][3]

What do the numbers mean?

Wafer handling6

Wafer sizes supported
4 inch, 6 inch, 8 inch (special order)[2]
Accurate?
Wafer sizes
4 inch[1]
Accurate?
Rotor options
4 inch or 6 inch rotor; special order rotor for 8 inch wafers[2]
Accurate?
Accessory with 8-inch rotor
Includes 1 custom Teflon cassette[2]
Accurate?
Wafer Sizes
4 inch, 6 inch, 8 inch (with custom rotor)[2]
Accurate?
Wafer Size (standard listing)
4 inch[1]
Accurate?

Configuration & options6

Equipment type
Spin Rinse Dryer[1]
Accurate?
Equipment type
Spin Rinse Dryer (Spin Rinser Dryer)[2]
Accurate?
Condition (as offered)
Refurbished, fully operational, 30 day warranty[2]
Accurate?
Asset number
132084[1]
Accurate?
Last confirm date
April 17, 2025[1]
Accurate?
Rotor Configuration (listing 2)
6 inch[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Semitool 270 SRD with 6" rotor——Configured with a 6-inch rotorsemistarcorp.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the Semitool 270 SRD?

The Semitool 270 SRD is a spin rinse dryer.[1][2]

Not publicly documented

The following facts about the 270 SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 270 SRD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 270 SRD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 270 SRD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 270 SRD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 270 SRD are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]jmind.com — jmind.comjmind.com
  3. [3]semistarcorp.com — semistarcorp.comsemistarcorp.com
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Last updated Oct 7, 2026.

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