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Plasma-Therm

Corial 200S

Plasma-Therm Corial 200S family
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The Corial 200S is a Plasma-Therm Corial brand product. The Corial 200S is intended for R&D and low-volume production. The Corial 200S offers high levels of adaptability for pilot production and experimentation.[1]

Plasma-ThermCorial 200S
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What it is

The Corial 200S is a plasma processing system from the Corial brand of Plasma-Therm. The Corial brand is positioned by Plasma-Therm for research and development and low-volume production applications.[1]

What can it run?

Process applications and technology nodes documented for this tool.

  • Pilot production
  • Experimentation

What do the numbers mean?

Configuration & options4

Brand
Corial[1]
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Manufacturer
Plasma-Therm[1]
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Product focus
R&D and low-volume production[1]
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Adaptability
High levels of adaptability[1]
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What replaced it?

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Which brand does the Corial 200S belong to?

The Corial 200S belongs to the Corial brand, which is a product line of Plasma-Therm focused on R&D and low-volume production.[1]

What level of adaptability does the Corial 200S offer?

The Corial 200S offers a high level of adaptability, making it useful for pilot production and experimentation.[1]

What are other models in the same Corial product line as the 200S?

Other models in the Corial product line include the Corial 200FA and the Corial 200R.[1]

Not publicly documented

The following facts about the Corial 200S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Corial 200S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Corial 200S are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Corial 200S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Corial 200S are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Corial 200S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]chaindustries.com — chaindustries.comchaindustries.com
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Last updated Oct 2, 2026.

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