Pfeiffer
TPU 170 Turbomolecular
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
Where it fits in the process flow
The TPU 170 is used with a backing or roughing pump and a controller to support operation.[6]
Applications
The TPU 170 is used in research, semiconductor processing, and surface science.[6]
The TPU 170 is used for physical vapor deposition, sputtering, evaporation, electron microscopy, surface analysis, mass spectrometry, and general laboratory research.[6]
What do the numbers mean?
Vacuum & pumping5
Dimensions & facilities2
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What auxiliary equipment does the TPU 170 use in operation?
The TPU 170 is used with a backing or roughing pump and a controller to support operation.[2]
Not publicly documented
The following facts about the TPU 170 Turbomolecular are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TPU 170 Turbomolecular are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TPU 170 Turbomolecular are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TPU 170 Turbomolecular are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TPU 170 Turbomolecular are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TPU 170 Turbomolecular is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]ptbsales.comptbsales.com
- [4]ptbsales.com — ptbsales.comptbsales.com
- [5]ajvs.comajvs.com
- [6]Pfeiffer Balzers TPU 170 Turbomolecular Vacuum Pump 170 L/s — recycledgoods.comrecycledgoods.com
Last updated Oct 10, 2026.
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