Pfeiffer

TMU 064 Turbomolecular

Q: What is the pumping speed for N2?

The pumping speed for N2 is 53 l/s.

Q: What is the nominal rotation speed?

The nominal rotation speed is 90,000 l/min.

Q: What controllers are available for the TMU 064?

The TMU 064 is available with a TCP015 controller or a TCP015M controller.

Pfeiffer TMU 064 family

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PfeifferTMU 064 Turbomolecular

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What it is

The Pfeiffer TMU 064 is a turbomolecular pump.^[1]^[2]

The TMU 064 appears in one configuration with a TCP015 controller and in another configuration with a TCP015M controller.^[1]^[2]^[4]

Where it fits in the process flow

The TMU 064 is used with a backing pump in a vacuum charging system in NASA test equipment.^[3]

What do the numbers mean?

Vacuum & pumping13

Equipment type: Turbomolecular pump^[3]
Pumping speed for N2: 53 l/s^[3]
Pumping speed for He: 42 l/s^[3]
Pumping speed for H2: 31 l/s^[3]
Final pressure, backing pump: ≤ 5 mbar^[3]
Maximum fore-vacuum pressure for N2: 14 mbar^[3]
Maximum fore-vacuum pressure for He: 10 mbar^[3]
Maximum fore-vacuum pressure for H2: 6 mbar^[3]
Maximum gas throughput for N2: 1.1 mbar^[3]
Maximum gas throughput for He: 1.5 mbar^[3]
Maximum gas throughput for H2: 1 mbar^[3]
Final pressure with diaphragm vacuum pump: < 1 x 10^-8 mbar^[3]
Final pressure with rotary vane vacuum pump: < 2 x 10^-10 mbar^[3]

Control & software6

With TCP015 Controller^[1]; With TCP015M controller^[2]
Controller: TCP015 controller^[1]
Controller: TCP015M controller^[2]
Controller: TCP015^[1]
Controller: TCP015M^[2]

Dimensions & facilities3

Cooling water consumption: 15 l/h with water at 15°C^[3]
Cooling water temperature: 5-25°C^[3]
Weight: 3.6 / 3.8 kg^[3]

Configuration & options16

Make: Pfeiffer^[1]
Model: TMU 064^[1]
Nominal rotation speed: 90,000 l/min^[3]
Standby rotation speed: 60,000 l/min^[3]
Run-up time: 2.5 min (up to 90% rated rotation speed)^[3]
Noise level: < 50 dB(A)^[3]
Inlet: DN 63 ISO-KF / DN 63 CF-F^[3]
Outlet: DN 16 ISO-KF / G 1/4"^[3]
Venting connection: G 1/8"^[3]
Maximum permissible rotor temperature: 90°C^[3]
Permissible heat radiation power: 4 W^[3]
Lubricant: TL 011^[3]
Cooling type: standard convection^[3]
Permissible ambient temperature with air cooling: 0-35°C^[3]
Heating power consumption: 40 W^[3]
Permissible magnetic field: 4 mT^[3]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
TMH 064	—	—	Listed as a related TMH/TMU 064 specification variant with DN 40 ISO-KF inlet in the specification table.	ptbsales.com^[3]
TMU 064 U SG DN 63 CF-F	—	—	Listed as a configuration option.	ptbsales.com^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Equipment typeTurbomolecular pump^[3]
Pumping speed for N253 l/s^[3]
Pumping speed for He42 l/s^[3]
Pumping speed for H231 l/s^[3]
Final pressure, backing pump≤ 5 mbar^[3]
Maximum fore-vacuum pressure for N214 mbar^[3]
Maximum fore-vacuum pressure for He10 mbar^[3]
Maximum fore-vacuum pressure for H26 mbar^[3]
Maximum gas throughput for N21.1 mbar^[3]
Maximum gas throughput for He1.5 mbar^[3]
Maximum gas throughput for H21 mbar^[3]
Final pressure with diaphragm vacuum pump< 1 x 10^-8 mbar^[3]
Final pressure with rotary vane vacuum pump< 2 x 10^-10 mbar^[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the pumping speed for N2?

The pumping speed for N2 is 53 l/s.^[3]

What is the nominal rotation speed?

The nominal rotation speed is 90,000 l/min.^[3]

What controllers are available for the TMU 064?

The TMU 064 is available with a TCP015 controller or a TCP015M controller.^[1]^[2]

Not publicly documented

The following facts about the TMU 064 Turbomolecular are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TMU 064 Turbomolecular are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TMU 064 Turbomolecular are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TMU 064 Turbomolecular are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TMU 064 Turbomolecular is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TMU 064 Turbomolecular are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]inventory listing
[2]inventory listing
[3]ptbsales.com — ptbsales.comptbsales.com
[4]TMU 064 Turbomolecular — Pfeiffer | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com