Pfeiffer
Hicube 80 Eco Turbo
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Pfeiffer HiCube 80 Eco is a turbo pumping station that combines a HiPace 80 turbopump with a backing pump to create high vacuum. The HiCube 80 Eco is a compact, modular pumping station suitable for high and ultra-high vacuum applications. The HiCube 80 Eco features an ultimate pressure of less than 1 × 10⁻⁷ hPa.[1][2][3]
What it is
General reference — not yet source-verifiedA turbo pumping station of this class combines a turbomolecular pump with a backing pump in a compact vacuum system. Such equipment is used to generate and maintain high vacuum in laboratory, analytical, and process equipment.
How it works
General reference — not yet source-verifiedTurbo pumping stations in this class use a high-vacuum turbomolecular stage above a fore-vacuum or backing stage. The backing pump supports the turbopump by maintaining the fore-vacuum side, while the turbopump removes gas from the vacuum vessel.
Where it fits in the process flow
General reference — not yet source-verifiedA pumping station of this type is generally used upstream of vacuum-dependent equipment to evacuate chambers before process exposure and to sustain low pressure during operation. The downstream function is to keep the connected chamber ready for measurement, coating, welding, analysis, or other vacuum work that depends on low-pressure conditions.
What do the numbers mean?
Power & electrical7
Vacuum & pumping10
Control & software2
Dimensions & facilities3
Configuration & options12
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| HiCube 80 Eco DN 63 ISO-K | — | — | Inlet flange DN 63 ISO-K | npl.washington.edu[2] |
| HiCube 80 Eco DN 63 CF | — | — | Inlet flange DN 63 CF | npl.washington.edu[2] |
| HiCube 80 Eco DN 40 ISO-KF | — | — | Inlet flange DN 40 ISO-KF, pumping speed for N₂ 35 l/s | highvacdepot.com[5] |
| HiCube 80 Eco DN 63 CF-F | — | — | DN 63 CF-F inlet flange; HiPace 80 turbopump; MVP 015-2 backing pump; DCU 002 control unit. | npl.washington.edu[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration115-230 V[4]
- Configuration50/60 Hz[4]
- TypeTurbo pumping station[1]
- TurbopumpHiPace 80[2]
- Backing pumpMVP 015-2[2]
- Pumping speed for N₂ (DN 63 ISO-K)67 l/s[1]
- Pumping speed for N₂ (DN 40 ISO-K)65 l/s[3]
- Ultimate pressure< 1 × 10⁻⁷ hPa[1]
- Ultimate pressure without gas ballast< 1 × 10⁻⁷ hPa[1]
- Mains voltage100 – 240 V[1]
- Mains frequency50/60 Hz[1]
- Sound pressure level≤ 50 dB(A)[1]
- Power supply packTPS 110[2]
- Pumping speed for N267 l/s[2]
- Backing pump pumping speed at 50 Hz0.5 m3/h[2]
- Ultimate pressure< 1 × 10^-7 hPa[2]
- Mains requirement110 V, 50/60 Hz; 230 V, 50/60 Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What maintenance is typically required for a turbomolecular pumping station?General reference — not yet source-verified
Routine maintenance includes periodic replacement of the backing pump’s exhaust filter and oil (if oil-lubricated) or diaphragm pump parts (if dry). The turbopump itself generally requires minimal maintenance, but should be checked for bearing wear and may need service after extended operation. Regular leak checks and monitoring of ultimate pressure are recommended.
Does this type of pumping station require a foreline backing pump?General reference — not yet source-verified
Yes, a turbomolecular pump cannot exhaust directly to atmosphere; it requires a backing pump to maintain a sufficiently low foreline pressure (typically in the rough vacuum range). The pumping station integrates this backing pump as part of the system.
Are these pumping stations compatible with corrosive or reactive gases?General reference — not yet source-verified
Standard versions are intended for clean, non-corrosive gases. For corrosive or reactive gas applications, special materials of construction (e.g., corrosion-resistant coatings) and additional safety features may be required. Users should consult the manufacturer’s guidelines for gas compatibility.
Not publicly documented
The following facts about the Hicube 80 Eco Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Hicube 80 Eco Turbo are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Hicube 80 Eco Turbo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Hicube 80 Eco Turbo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Hicube 80 Eco Turbo is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Hicube 80 Eco Turbo are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]ajvs.com — ajvs.comajvs.com
- [2]npl.washington.edu — npl.washington.edunpl.washington.edu
- [3]ajvs.com — ajvs.comajvs.com
- [4]Inventory photo
- [5]highvacdepot.com — highvacdepot.comhighvacdepot.com
Last updated Oct 10, 2026.
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