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Onto Innovation

AXI 930

Onto Innovation AXI 930 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Onto Innovation / Rudolph AXI 930 is a macro inspection system that detects wafer-level and die-level defects. The AXI 930 supports wafers up to 8 inches and is configured with 2 load ports.[1]

Onto InnovationAXI 930
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What it is

The AXI 930 is a macro inspection system for semiconductor wafers.[1]

How it works

The AXI 930 is used to detect wafer level and die level defects.[1]

Applications

The AXI 930 is used for wafer level defect detection.[1]

What do the numbers mean?

Wafer handling2

Detection capability
Wafer-level and die-level defects[1]
Accurate?
Wafer size
8" (200 mm)[1]
Accurate?

Configuration & options4

Chamber
AXI-1007[2]
Accurate?
Type
Macro Inspection System[1]
Accurate?
Load ports
2[1]
Accurate?
Alternative model designation
AXI-930[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the AXI 930 used for?

The AXI 930 is used as a macro inspection system to detect wafer level and die level defects.[1]

Not publicly documented

The following facts about the AXI 930 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AXI 930 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AXI 930 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AXI 930 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AXI 930 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AXI 930 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]jenesisequipment.com — jenesisequipment.comjenesisequipment.com
  2. [2]inventory listing
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Last updated Sep 24, 2026.

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