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Onto Innovation

Accent / Bio-Rad QS 2200 A Automated FT-IR

The Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR Spectrometer is an automated FT-IR spectrometer. The Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR Spectrometer is configured for 4-inch to 8-inch wafers. The Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR Spectrometer is configured for reflective measurements only.[1]

Accent / Bio-Rad QS 2200 A Automated FT-IR — Inventory photo
Fig. 01Accent / Bio-Rad QS 2200 A Automated FT-IRInventory photo[1]

Wafer size

Dual cassette wafer handling

Power

120V, 1Ph., 10A, 50/60 Hz[1]

What it is

The Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR is an automated Fourier transform infrared spectrometer for wafer measurements.[1]

The QS 2200 A is configured for reflective measurements only. The machine uses dual cassette wafer handling and is set up for wafers from four inches to eight inches.[1]

How it works

The QS 2200 A uses a potassium bromide beamsplitter, a three-axis robot with an integrated flat finder and controller, and a stage controller to support automated operation. The system also includes SECS/GEM interface software and a GUI application for control.[1]

Where it fits in the process flow

The QS 2200 A fits in metrology and process control for wafer films. The equipment measures Si epi and SiN film Z thickness by reflective FT-IR.[1]

Applications

The QS 2200 A is used for silicon epitaxy and silicon nitride film measurement. The system is intended for reflective thickness metrology on processed wafers.[1]

What do the numbers mean?

Power & electrical2

Voltage
120V, 1Ph., 10A, 50/60 Hz[1]
Accurate?
Power requirements
120V, 1Ph., 10A, 50/60 Hz[1]
Accurate?

Wafer handling9

Wafer size
Dual cassette wafer handling[1]
Accurate?
Wafer size
Dual Cassette Wafer Handling for 100mm – 200mm Wafers.[1]
Accurate?
GENMARK 3 Axis Robot with Integrated Flat Finder & Controller[1]
Accurate?
Accent Robot Interface[1]
Accurate?
Wafer sizes
4, 5, 6, 8 inch[1]
Accurate?
Wafer handling
Dual cassette wafer handling[1]
Accurate?
Wafer range
100mm – 200mm wafers[1]
Accurate?
Robot
GENMARK 3 Axis Robot with Integrated Flat Finder & Controller[1]
Accurate?
Robot interface
Accent Robot Interface[1]
Accurate?

Control & software7

Accent 013-4738-2 Stage Controller[1]
Accurate?
Accent GUI Application Software[1]
Accurate?
SECS/GEM Interface Software[1]
Accurate?
Stage controller
Accent 013-4738-2 Stage Controller[1]
Accurate?
Control software
Windows XP[1]
Accurate?
GUI application software
Accent GUI Application Software[1]
Accurate?
Interface software
SECS/GEM Interface Software[1]
Accurate?

Configuration & options14

Si epi, SiN[1]
Accurate?
Film Z thickness measurement[1]
Accurate?
Potassium Bromide (KBr) Beamsplitter[1]
Accurate?
Accent 013-4758-2 AC Power Box[1]
Accurate?
Windows XP[1]
Accurate?
19” Color Flatscreen Monitor[1]
Accurate?
Configured for reflective measurements only[1]
Accurate?
Refurbished[1]
Accurate?
Model
QS 2200 A[1]
Accurate?
Type
Automated FT-IR Spectrometer[1]
Accurate?
Beamsplitter
Potassium Bromide (KBr)[1]
Accurate?
AC power box
Accent 013-4758-2 AC Power Box[1]
Accurate?
Monitor
19” Color Flatscreen Monitor[1]
Accurate?
Measurement mode
Configured for reflective measurements only[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage120V, 1Ph., 10A, 50/60 Hz[1]
  • Power requirements120V, 1Ph., 10A, 50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Accent / Bio-Rad QS 2200 A Automated FT-IR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Accent / Bio-Rad QS 2200 A Automated FT-IR are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Accent / Bio-Rad QS 2200 A Automated FT-IR are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Accent / Bio-Rad QS 2200 A Automated FT-IR are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Accent / Bio-Rad QS 2200 A Automated FT-IR are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Accent / Bio-Rad QS 2200 A Automated FT-IR is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 5, 2026.

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