Nikon

NSR 2205 i 10 D i-Line

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Nikon NSR 2205 i 10 D i-Line is a lithography stepper.^[1]^[2]

The Nikon NSR 2205 i 10 D i-Line is an i-line stepper for six-inch and eight-inch wafers.^[1]^[2]

How it works

General reference — not yet source-verified

A stepper transfers a reticle pattern onto a photosensitive wafer surface through repeated exposures of small fields.

An i-line lithography tool uses near-ultraviolet exposure for pattern transfer in mature-node semiconductor fabrication.

Where it fits in the process flow

General reference — not yet source-verified

The Nikon NSR 2205 i 10 D i-Line sits in the photolithography stage of wafer processing.

The Nikon NSR 2205 i 10 D i-Line is used after resist coating and before resist development and subsequent pattern-transfer steps.

Applications

The Nikon NSR 2205 i 10 D i-Line is used for semiconductor patterning on six-inch and eight-inch wafers.^[1]^[2]

What do the numbers mean?

Wafer handling1

Wafer sizes: 6-inch and 8-inch^[1]

Optics & imaging1

Resolution: 0.45um^[1]

Configuration & options2

0.45um^[1]
Type: i-line stepper^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Nikon NSR 2205 i 10 D i-Line handle?

The Nikon NSR 2205 i 10 D i-Line is for six-inch and eight-inch wafers.^[1]^[2]

What class of lithography tool is the Nikon NSR 2205 i 10 D i-Line?

The Nikon NSR 2205 i 10 D i-Line is an i-line stepper.^[1]^[2]

Not publicly documented

The following facts about the NSR 2205 i 10 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 i 10 D i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 i 10 D i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 i 10 D i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 i 10 D i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 i 10 D i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report