Nikon
NSR 2005 i 11 D i-Line
What it is
How it works
General reference — not yet source-verifiedA lithography stepper aligns a reticle image to a wafer and projects that image through reduction optics onto photoresist.
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling5
Optics & imaging5
- Lens Controller[1]
Performance2
Control & software1
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the typical resolution of an i-line stepper?General reference — not yet source-verified
i-line steppers generally offer resolution in the submicron range, suitable for critical dimensions down to a few tenths of a micrometer, depending on the lens design and process conditions.
What are the main components of an i-line stepper?General reference — not yet source-verified
The main components include an i-line mercury lamp light source, a reticle stage, a reduction projection lens, a wafer stage with interferometric control, and an alignment system. Environmental control such as temperature and vibration isolation is also integrated.
What are common maintenance requirements for an i-line stepper?General reference — not yet source-verified
Routine maintenance includes lamp replacement, lens cleaning, optics alignment calibration, stage calibration, and filter changes. Regular preventive maintenance ensures consistent overlay and focus performance.
Not publicly documented
The following facts about the NSR 2005 i 11 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 11 D i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 11 D i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 11 D i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2005 i 11 D i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2005 i 11 D i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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