Laurell
WS-750Lz-23B
The Laurell WS-750Lz-23B is a spin coater. The Laurell WS-750Lz-23B belongs to the 750 Series. The Laurell WS-750Lz-23B has a maximum substrate size of ø150mm (5" x 5").[1]
What it is
The Laurell WS-750Lz-23B is a spin coater. The WS-750Lz-23B belongs to the 750 Series. The WS-750Lz-23B accommodates substrates up to 150 mm (5" × 5") in size. The WS-750Lz-23B spins at a maximum speed of 12,000 rpm. Mounting options for the WS-750Lz-23B include tabletop, in-deck, and on-deck configurations.[1]
How it works
General reference — not yet source-verifiedA spin coater operates by securing the substrate to a vacuum chuck and accelerating it to a controlled rotational speed. Coating liquid is metered onto the substrate surface, often at the center, and centrifugal force draws it radially outward. Film thickness is determined by spin speed, acceleration, and spin time. Excess coating material is flung off the edge of the substrate during the process.
Where it fits in the process flow
General reference — not yet source-verifiedSpin coating is a step in photolithographic patterning and other thin-film deposition flows. The spin coater applies a liquid photoresist or other coating to a cleaned substrate before subsequent baking and exposure steps. The coated substrate proceeds to prebake, alignment, exposure, development, and etching or deposition stages downstream.
What can it run?
Process applications and technology nodes documented for this tool.
- Spin coating
What do the numbers mean?
Wafer handling1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of machine is the WS-750Lz-23B?
The WS-750Lz-23B is a spin coater.[1]
What process family does the WS-750Lz-23B belong to?
The WS-750Lz-23B belongs to Laurell’s 750 Series.[1]
What mounting options are specified for the WS-750Lz-23B?
The WS-750Lz-23B is specified with tabletop, in-deck, and on-deck mounting options.[1]
Not publicly documented
The following facts about the WS-750Lz-23B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-750Lz-23B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-750Lz-23B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-750Lz-23B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-750Lz-23B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-750Lz-23B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]laurell.com — laurell.comlaurell.com
Last updated Oct 8, 2026.
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