Lam Research

Alliance A 6

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The Lam Research Alliance A 6 is a semiconductor etch system categorized as a multi-process etch tool. The Alliance A 6 Multi-Process is categorized under Etch.^[1]^[2]

Alliance A 6 — Inventory photo — Fig. 01Alliance A 6Inventory photo^[3]

What it is

The Lam Research Alliance A 6 is a semiconductor manufacturing etch system.^[1]^[2]

How it works

The Alliance A 6 appears with a robot for wafer handling and an enhanced gas box for process gas delivery, which indicates an integrated platform for automated transfer and recipe-controlled chemistry.^[1]^[3]

Applications

The Alliance A 6 is used for semiconductor etch processing.^[1]^[2]

The Alliance A 6 Multi-Process is categorized as an etch tool.^[2]

What do the numbers mean?

Wafer handling3

MAG 7 Robot^[3]
Wafer handling: MAG 7 Robot^[1]
Robot: MAG 7 Robot^[1]

Gas & chemistry3

Enhanced Gas Box (12 gas)^[3]
Gas & chemistry: Enhanced Gas Box (12 gas)^[1]
Gas Box: Enhanced Gas Box (12 gas)^[1]

Configuration & options12

VCE Bellows^[1]; 2 Chamber 4520 XLE^[1]
Manufacturer: Lam Research^[1]
Model: Alliance A 6^[3]; Mainframe Only^[2]
Chambers: 4 chambers^[4]
Chamber configuration: 1 MW strip chamber, 2 PTX 9600 chambers, 1 PTX 9400 chamber^[4]2 sources; End point detection^[4]
Chamber Configuration: 2 Chamber 4520 XLE^[1]
VCE Bellows: VCE Bellows^[1]
Chamber Configuration: 4 chambers^[1]
End Point Detection: Yes^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationEnhanced Gas Box (12 gas)^[3]
Gas & chemistryEnhanced Gas Box (12 gas)^[1]
Gas BoxEnhanced Gas Box (12 gas)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Lam Research Alliance A 6?

The Lam Research Alliance A 6 is a semiconductor etch system categorized as a multi-process etch tool.^[1]^[2]

What is the category of the Alliance A 6 Multi-Process?

The Alliance A 6 Multi-Process is categorized under Etch.^[2]

Not publicly documented

The following facts about the Alliance A 6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance A 6 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alliance A 6 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance A 6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance A 6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alliance A 6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report