Lam Research
Alliance 9600 PTX
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research Alliance 9600 PTX is an etcher used in semiconductor manufacturing. The Alliance 9600 PTX is manufactured by Lam Research.[1][2]
What it is
How it works
General reference — not yet source-verifiedIn a typical plasma etch process, a reactive gas mixture is introduced into a vacuum chamber and energized by an RF or microwave field to create a plasma containing ions and radicals.
The radicals react chemically with the exposed film on the wafer, while ions are accelerated toward the wafer surface to provide directional etching, producing anisotropic profiles.
Where it fits in the process flow
General reference — not yet source-verifiedEtch tools are used after lithography to transfer the photoresist pattern into the underlying thin film by selectively removing material where the mask is open.
Applications
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the Alliance 9600 PTX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the Alliance 9600 PTX are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance 9600 PTX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alliance 9600 PTX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance 9600 PTX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance 9600 PTX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Alliance 9600 PTX — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 27, 2026.
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