KLA
RS 75 TCA
What it is
How it works
The KLA RS 75 TCA includes a high-speed integrated flat aligner and a dual-cassette wafer handler for 100 mm to 200 mm wafers.[4]
Measurement specifications include a range from less than 5 mΩ/sq to greater than 5 MΩ/sq, absolute accuracy based on NIST standards, and measurement repeatability of less than 0.2% per KLA-Tencor's criteria.[4]
Edge exclusion depends on the probe head: 3 mm for a 25 mil probe head, 4 mm for a 40 mil probe head, and 5 mm for a 62.5 mil probe head.[4]
Temperature measurement accuracy is ±0.5°C with repeatability of ±0.2°C.[4]
The KLA RS 75 TCA is powered by a 486/66 MHz computer with a 300 MB fixed hard drive, a 44 MB removable hard drive, and a 1.4 MB 3.5-inch floppy drive, and uses a high-resolution color monitor.[4]
Throughput is up to 100 wafers per hour based on a 5-site test with a single cassette.[4]
Applications
The system is a four-point probe (4PP) designed for sheet resistance measurement.[4]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Needs refurbishing
What do the numbers mean?
Power & electrical10
Wafer handling5
Configuration & options13
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the KLA RS 75 TCA?
The KLA RS 75 TCA is a KLA-made resistivity system.[3]
Not publicly documented
The following facts about the RS 75 TCA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RS 75 TCA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RS 75 TCA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RS 75 TCA are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the RS 75 TCA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the RS 75 TCA are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]jenesisequipment.com — jenesisequipment.comjenesisequipment.com
Last updated Oct 10, 2026.
